Fine Focus Electron Guns
SEM - SAM - AUGER - Surface studies

max. Energy

Spot size

Working distance

Applications

        15 keV

    50 nm

10  - 50 mm

Scanning Electron
Microscopy (SEM)

Scanning AUGER (SAM)

AUGER (AES)
 

MEED (Medium energy electron diffraction)

Surface studies

        12 keV

   200 nm

        10 keV

   500 nm

          8 keV

       1 μm

          5 keV

       3 μm

          5 keV

       6 μm
Beam pulsing Beam blanking Stable current
Digital Imaging Accessories Computer Control
Long life filament UHV compatible