Energy Filtered EBSD

Available for SEM and UHV chambers

Electron Back Scattered Diffraction can now be upgraded with an Imaging Energy Filter that selects an adjustable energy range.

  • Drastically improves the contrast of diagrams
  • Raw data already reveals detailed structure information
  • Explores the energy dependence of scattering
  • Performs Energy Loss measurements (ELS)
  • Fast Acquisition (CCD) with adjustable shutter speed

Unfiltered Diagram

Unfiltered Diagram

Filtered Diagram

Filtered Diagram

Images courtesy of A. Deal and A. Eades of Lehigh University


Filter Unit

Filter Unit assembled for a SEM chamber.
The same unit is available with a standard CF flange.


Patented Design of the imaging filter.

Filter Unit Diagram


  • Data acquisition system
  • UHV SEM electron sources
  • Computer controls
  • Ion source for cleaning