max. Energy

Spot size

Working distance

Applications

        15 keV

    50 nm

10  - 50 mm

Scanning Electron
Microscopy (SEM)

Scanning AUGER (SAM)

AUGER (AES) 
 

MEED (Medium energy electron diffraction)

Surface studies

        12 keV

   200 nm

        10 keV

   500 nm

          8 keV

       1 µm

          5 keV

       3 µm

          5 keV

       6 µm